oUR pRODUCTS

Wafer Loader

Wafer Loader Open Cassette Type

  • 4”-8” wafer or glass
  • Notch/flat & centering alignment
  • Cassette mapping
  • Cassette misplaced alarm
  • RFID reader (option) • SECS/GEM (option)
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Wafer Loader FOUP type

  • 8”~12” FOUP/ FOSBE/Open cassette loader/unloaderNotch/flat & centering alignment
  • Notch/flat & centering alignment
  • Cassette mapping
  • Cassette misplaced alarm
  • RFID reader (option)
  • SECS/GEM (option)
  • Handle warped silicone wafer up to
  • 10mm(option)
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