Software & Connectivity

• PC + PLC + GUI control
• Supports SECS GEM / EAP / FDS protocols

Reliability Metrics


Advanced Wafer Wet Process System

Wafer Capacity

• Size: 4–12 inches
• Load: 25 pcs × 1 or 2 cassettes

Cassette Configuration

• 3 acid / 3 water or 4 acid / 4 water (customizable)
  

Process Control Features

• Chemical loop control
• Heating & concentration management
• Precision flow regulation
• Separated exhaust and discharge for acid/alkali/ organic liquids

Chemical Supply

• CCSS / LCSS compatible
• Automatic mixed acid system •
• Recovery or discharge options available
  

System Hardware

• CO₂ fire extinguishing device
• Antistatic generator
• Integrated camera