Specs

• Application Process: Underfill Curing / DAF Curing
• Dual Chamber type (W440xD400x400mm/each)
• Temperature: Max.200°C (Uniformity ± 3°C)
• Heating rate: 25°C -> 175°C (25min)
• Cooling rate: 175°C ->80°C (20min)
• Pressure: 0~10Kg/cm²
• Vacuum: 50 Torr
• O2 concentration: ≦50ppm
• Cleanliness: Class100