oUR pRODUCTS
6/8 inch Wafer Boat/Box Cleaning Machine


Cassette & Box Cleaning System – DIW Spray Type
Compatible Carrier Types
- 6" / 8" CASSETTE • BOX containers (various formats supported)
Production Capacity
- Cleans 24 CASSETTEs or 12 BOXes in 30 minutes
Core Functional Features
- DIW Rotary Spray for uniform coverage
- N₂ Drying: Max. 80°C
- Rotary Mechanism: Up to 400 rpm/min
- Particle removal ≥ 0.2μm at ≥ 95% efficiency
Operation Workflow
- Set cleaning recipe parameters
- Manually place CASSETTEs and BOXes on the cleaning rack
- Press “Start” to begin cleaning cycle
- System runs automatically per recipe
- Completion alert via music bell + light signal 6.Manually remove cleaned carriers