oUR pRODUCTS

6/8 inch Wafer Boat/Box Cleaning Machine

Cassette & Box Cleaning System – DIW Spray Type


Compatible Carrier Types

  • 6" / 8" CASSETTE • BOX containers (various formats supported)


Production Capacity

  • Cleans 24 CASSETTEs or 12 BOXes in 30 minutes


Core Functional Features

  • DIW Rotary Spray for uniform coverage
  • N₂ Drying: Max. 80°C
  • Rotary Mechanism: Up to 400 rpm/min
  • Particle removal ≥ 0.2μm at ≥ 95% efficiency


Operation Workflow

  1. Set cleaning recipe parameters
  2. Manually place CASSETTEs and BOXes on the cleaning rack
  3. Press “Start” to begin cleaning cycle
  4. System runs automatically per recipe
  5. Completion alert via music bell + light signal 6.Manually remove cleaned carriers