Functional Features

• DI Water Spray: Rotary spray mechanism
• N₂ Drying System: Max. 80°C drying temperature
• Rotary Mechanism Speed: Up to 400 rpm/min

Cleaning Performance

• Removes particles ≥ 0.2μm
• Minimum 95% removal efficiency
  

FOUP Cleaning System – DIW Spray Type

Product Size & Carrier Type

• Compatible with: 12” FOUP containers

Production Capacity

• Cleans up to 8 FOUPs in 30 minutes
  

Operation Workflow

1. Set cleaning recipe parameters
2. Manually place FOUP on cleaning rack
3. Press “Start” to initiate cleaning cycle
4. .Automatic process runs per recipe
5. Completion alert via music bell & light
6. Manually remove FOUP